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Improvement of nitrogen incorporation into oxynitrides on 4H-SiC(0 0 0 1)

✍ Scribed by P. Hoffmann; D. Schmeißer

No coin nor oath required. For personal study only.

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Improvement of nitrogen incorporation into oxynitrides on 4H-SiC(0&#xa0;0&#xa0;0&#xa0;1)