Fabrication of photonic crystal structur
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Byeon, Kyeong-Jae ;Park, Hyoungwon ;Cho, Joong-Yeon ;Yang, Ki-Yeon ;Baek, Jong H
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Article
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2010
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John Wiley and Sons
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English
β 678 KB
## Abstract Waferβscale UV nanoimprint and dry etching processes were used to fabricate photonic crystal patterns on an indium tin oxide (ITO) top electrode of GaNβbased green lightβemitting diodes (LEDs). Photonic crystal patterns with pitches ranging from 600 to 900βnm were transferred to the ent