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Nitride-based light emitting diodes with indium tin oxide electrode patterned by imprint lithography

✍ Scribed by Chang, S. J.; Shen, C. F.; Chen, W. S.; Kuo, C. T.; Ko, T. K.; Shei, S. C.; Sheu, J. K.

Book ID
121507104
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
498 KB
Volume
91
Category
Article
ISSN
0003-6951

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## Abstract Wafer‐scale UV nanoimprint and dry etching processes were used to fabricate photonic crystal patterns on an indium tin oxide (ITO) top electrode of GaN‐based green light‐emitting diodes (LEDs). Photonic crystal patterns with pitches ranging from 600 to 900 nm were transferred to the ent