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Improvement in the stability of amorphous SiN−BN films prepared by hybrid-plasma-enhanced chemical vapour deposition

✍ Scribed by Kanji Yasui; Hidetaka Itoh; Tadashi Akahane

Book ID: 113205344
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 315 KB
Volume: 281-282
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08661-0

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