✦ LIBER ✦

Improved stability of a-Si:H fabricated from SiH2Cl2 by ECR hydrogen plasma

✍ Scribed by M. Azuma; T. Yokoi; I. Shimizu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of stable hydrogenated amorp

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Stable a-Si:H fabricated from halogenous

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