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Fabrication of stable hydrogenated amorphous silicon from SiH2Cl2 by ECR-hydrogen-plasma

✍ Scribed by Takayuki Yokoi; Masanobu Azuma; Hidenobu Ishida; Isamu Shimizu

Book ID
108029192
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
290 KB
Volume
34
Category
Article
ISSN
0927-0248

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hand, This balance generally results in a temperature in the town that is slightly higher than in the surrounding country. Using solar energy saves imported fuels on one hand, but increases the absorption of solar radiation on the other hand. Simple, steady state models are used to assess the channe