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Improved photoluminescence of silicon nanocrystals in silicon nitride prepared by ammonia sputtering

✍ Scribed by Ma, K; Feng, J Y; Zhang, Z J


Book ID
121489078
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
533 KB
Volume
17
Category
Article
ISSN
0957-4484

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Si nanocrystals (NCs) embedded in an SiC matrix were prepared by the deposition of Si-rich Si 1-x C x /SiC nanomultilayer films using magnetron sputtering, subsequently followed by thermal annealing in the range of 800 ∼ 1200 °C. As the annealing temperature increases to 1000 °C, Si NCs begin to for