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Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

✍ Scribed by J. Müller; T.S. Böscke; U. Schröder; M. Reinicke; L. Oberbeck; D. Zhou; W. Weinreich; P. Kücher; M. Lemberger; L. Frey

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 587 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.03.076

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