✦ LIBER ✦
Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
✍ Scribed by T. Bertaud; C. Bermond; T. Lacrevaz; C. Vallée; Y. Morand; B. Fléchet; A. Farcy; M. Gros-Jean; S. Blonkowski
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 813 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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