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Improved contacts on a porous silicon layer by electroless nickel plating and copper thickening

✍ Scribed by Kanungo, J; Pramanik, C; Bandopadhyay, S; Gangopadhyay, U; Das, L; Saha, H; Gettens, Robert T T


Book ID
125420873
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
444 KB
Volume
21
Category
Article
ISSN
0268-1242

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Improved microwave performance of spiral
✍ Ming-Jie Yu; Yi-Jen Chan; Li-Hong Laih; Jyh-Wong Hong 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 114 KB

Spiral inductors ha¨e been e¨aluated on Si substrates by inserting a porous Si layer for the application of MMICs. This high-resis-ti¨e porous Si layer pro¨ides a low substrate loss and a low coupling effect. Spiral inductors fabricated on this layer achie¨e better Q-and inductance ¨alues. A 9.7 nH