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Improved and new surface analysis and depth profiling methods for the analysis of semiconductor technology problems

✍ Scribed by R.v. Criegern

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
389 KB
Volume
41
Category
Article
ISSN
0042-207X

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Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth proÐling analysis of thin, insulating barrier anodic Ðlms formed on aluminium. It allows ready and rapid analysis of the Ðlms, with depth resolution and sensitivity