Improved accuracy in concentration profile determination by means of Auger electron spectroscopy
β Scribed by J.F. Smith; H.N. Southworth
- Publisher
- Elsevier Science
- Year
- 1984
- Weight
- 87 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0376-4583
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π SIMILAR VOLUMES
In-depth composition profiles of the an&c oxide films grown on Al (1 I1 ), (I 10) and (100) single crystal electrodes in ammonium borate were studied by Auger electron spectroscopy with Ar ion etching. The oxide film had the composition of Ai,O, as referenced to an authentic a-Al,O, single crystal.
Elastic peak depth proΓling was carried out on an Mo/Si multilayer system using a rotating specimen, grazing angle of incidence (86Γ with respect to the surface normal) and 0.5 keV Ar ion energy. The depth proΓling was simulated by dynamic TRIM (T-DYN) code. The T-DYN code provided the in-depth dist