Imprint template fabrication based on glass wet etching using a soft etching mask

✍ Scribed by Wang, Quandai; Duan, Yugang; Lu, Bingheng; Ding, Yucheng; Tang, Yiping

• Book ID: 120431573
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 450 KB
• Volume: 16
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/16/3/012