✦ LIBER ✦
Fine pattern fabrication of α-type Ta on a membrane for X-ray mask absorber using ECR ion stream etching
✍ Scribed by T. Tsuchizawa; C. Takahashi; M. Shimada; S. Uchiyama; T. Ono; M. Oda
- Book ID
- 104305506
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 852 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0167-9317
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