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Implications in the use of secondary ion mass spectrometry to investigate impurity concentration profiles in solids

✍ Scribed by Schulz, F.; Wittmaack, K.; Maul, J.

Book ID
121238931
Publisher
Informa UK (Taylor & Francis)
Year
1973
Weight
461 KB
Volume
18
Category
Article
ISSN
0033-7579

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## Abstract Secondary ion mass spectrometry (SIMS) is a technically matured analysis technique for the investigation of depth and lateral distributions in solids. The β€œraw data” of a SIMS measurement provides only qualitative information. For quantification so‐called relative sensitivity factors (R