Implant isolation of InP by nitrogen irradiation: Effect of dose, initial carrier concentration and implantation temperature

✍ Scribed by P. Too; S. Ahmed; R. Gwilliam; B.J. Sealy

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 106 KB
• Volume: 240
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.06.111