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Implant gettering and ion beam detection of generation impurities in silicon : B. Golja and A. G. Nassibian. Microelectron. J.13 (6), 23 (1982)

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ar ion implant damage gettering of gener

✍ Golja, B.; Nassibian, A.G. 📂 Article 📅 1979 🏛 Institution of Electrical Engineers ⚖ 718 KB

Ion implant gettering of generation impu

✍ B. Golja; A.G. Nassibian; D. Cohen 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 420 KB

Ar-ion implant damage gettering of gener

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 122 KB