✦ LIBER ✦
Ar-ion implant damage gettering of generation impurities in silicon employing voltage ramping and nitrogen back-scattering : B. Golja and A. G. Nassibian. Solid-St. electron Devices3, (5) 127 (September 1979)
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 122 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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