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Impedance matching network for rf sputtering systems

✍ Scribed by D.J. Healey III; M Lauriente

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 175 KB
Volume: 17
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(67)93166-1

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