✦ LIBER ✦
Experimental and design information for calculating impedance matching networks for use in rf sputtering and plasma chemistry
✍ Scribed by H Norström
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 892 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.