✦ LIBER ✦
Automatic impedance matching system for rf sputtering : N. M. Mazza, IBM J. Res. Dev. 14, No. 2, March (1970), p. 192
- Publisher
- Elsevier Science
- Year
- 1970
- Tongue
- English
- Weight
- 168 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0026-2714
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