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Impacts of Zr Composition in Gate Dielectrics on Their Crystallization Behavior and Bias-Temperature-Instability Characteristics

✍ Scribed by Hyung-Suk Jung; So-Ah Lee; Sang-ho Rha; Sang Young Lee; Hyo Kyeom Kim; Do Hyun Kim; Kyu Hwan Oh; Jung-Min Park; Weon-Hong Kim; Min-Woo Song; Nae-In Lee; Cheol Seong Hwang

Book ID: 114620470
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 1009 KB
Volume: 58
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2011.2136380

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