Impact of the particles impingement on the electronic conductivity of Al doped ZnO films grown by reactive magnetron sputtering

✍ Scribed by Jullien, M; Horwat, D; Endrino, J L; Galindo, R Escobar; Bauer, Ph; Pierson, J F

• Book ID: 121463878
• Publisher: IOP Publishing
• Year: 2010
• Weight: 634 KB
• Volume: 12
• Category: Article
• ISSN: 1757-8981
• DOI: 10.1088/1757-899X/12/1/012006