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Impact of Hydrogenation of ZnO TFTs by Plasma-Deposited Silicon Nitride Gate Dielectric

โœ Scribed by Remashan, K.; Dae-Kue Hwang; Seong-Ju Park; Jae-Hyung Jang


Book ID
114619142
Publisher
IEEE
Year
2008
Tongue
English
Weight
737 KB
Volume
55
Category
Article
ISSN
0018-9383

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