Impact of $\hbox{CF}_{4}$ Plasma Treatment on GaN

✍ Scribed by Rongming Chu, ; Chang Soo Suh, ; Man Hoi Wong, ; Fichtenbaum, N.; Brown, D.; McCarthy, L.; Keller, S.; Feng Wu, ; Speck, J.S.; Mishra, U.K.

• Book ID: 120195246
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 170 KB
• Volume: 28
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2007.902849