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Study of CF4 plasma treatment in drift region optimization of high-voltage GaN MOSC-HEMTs

✍ Scribed by Zhongda Li; Jie Zhang; T. Paul Chow

Book ID: 112182291
Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 516 KB
Volume: 9
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.201100413

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