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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A new method for hermeticity measurements using porous ultra low k dielectrics for sub-ppm moisture detection

✍ Scribed by Grange, H.; Danel, JS; Feldis, H.; Desloges, B.; Jousseaume, V.; Licitra, C.; Manquat, P. Brunet; Grosgeorges, P.; Fassi, B.; Sbiaa, Z.; Robert, P.

Book ID: 126768469
Publisher: IEEE
Year: 2009
Weight: 622 KB
Category: Article
ISBN: 1424441900
DOI: 10.1109/SENSOR.2009.5285536

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