𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Polysilicon sensors for CMOS-MEMS electrothermal probes

✍ Scribed by Liu, J.; Noman, M.; Bain, J.A.; Schlesinger, T.E.; Fedder, G.K.

Book ID: 118013297
Publisher: IEEE
Year: 2009
Weight: 550 KB
Volume: 0
Category: Article
ISBN: 1424441900
DOI: 10.1109/sensor.2009.5285434

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