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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A monolithic integrated micromachined piezoresistive flow sensor

✍ Scribed by Li, Dan; Zhao, T.; Qian, L.; Yang, Z. C.; Zhang, Dacheng

Book ID: 120247574
Publisher: IEEE
Year: 2009
Weight: 731 KB
Category: Article
ISBN: 1424441900
DOI: 10.1109/SENSOR.2009.5285515

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