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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Encapsulation of vacuum sensors in a waffr level package using a gold-silicon eutectic

✍ Scribed by Mitchell, J.; Lahiji, G.R.; Najafi, K.

Book ID: 120254670
Publisher: IEEE
Year: 2005
Weight: 678 KB
Volume: 1
Category: Article
ISBN-13: 9780780389946
DOI: 10.1109/SENSOR.2005.1496570

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