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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - A lateral field-emission RF MEMS device

✍ Scribed by Yamashita, K.; Sun, W.; Kakushima, K.; Fujita, H.; Toshiyoshi, H.

Book ID: 124167083
Publisher: IEEE
Year: 2005
Weight: 588 KB
Volume: 1
Category: Article
ISBN-13: 9780780389946
DOI: 10.1109/SENSOR.2005.1496647

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