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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Fabrication of high-aspect-ratio PZT thick film structure using sol-gel technique and SU-8 photoresist

✍ Scribed by Futai, N.; Matsumoto, K.; Shimoyama, I.

Book ID: 126662278
Publisher: IEEE
Year: 2002
Weight: 610 KB
Category: Article
ISBN-13: 9780780371859
DOI: 10.1109/MEMSYS.2002.984231

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