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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - CMOS MEMS - present and future

✍ Scribed by Baltes, H.; Brand, O.; Hierlemann, A.; Lange, D.; Hagleitner, C.

Book ID: 118237720
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 864 KB
Volume: 0
Category: Article
ISBN-13: 9780780371859
DOI: 10.1109/memsys.2002.984302

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