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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Matrix combination of MEMS relays

✍ Scribed by Fabian, J.H.; Niayesh, K.; Kotilainen, S.; Wapelhorst, E.; Niemeyer, L.; Strumpler, R.

Book ID: 118123014
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 323 KB
Volume: 0
Category: Article
ISBN-13: 9780780382657
DOI: 10.1109/mems.2004.1290723

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