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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Wireless micromachined ceramic pressure sensors

✍ Scribed by English, J.M.; Allen, M.G.

Book ID: 118186889
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 669 KB
Edition: 1999
Volume: 0
Category: Article
ISBN-13: 9780780351943
DOI: 10.1109/memsys.1999.746881

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