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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Residual stress in thin-film parylene-c

✍ Scribed by Harder, T.A.; Tze-Jung Yao, ; Qing He, ; Chi-Yuan Shih, ; Yu-Chong Tai,

Book ID: 120178535
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 516 KB
Category: Article
ISBN-13: 9780780371859
DOI: 10.1109/MEMSYS.2002.984296

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