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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - MEMS with thin-film aerogel

✍ Scribed by Shih-Kang Fan, ; Chang-Jin Kim, ; Jong-Ah Paik, ; Dunn, B.; Patterson, P.R.; Wu, M.C.

Book ID: 120617020
Publisher: IEEE
Year: 2001
Weight: 736 KB
Edition: Revised
Category: Article
ISBN-13: 9780780359987
DOI: 10.1109/MEMSYS.2001.906494

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