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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - Micromachining techniques for liquid crystal polymer

✍ Scribed by Xuefeng Wang, ; Liang-Hsuan Lu, ; Chang Liu,

Book ID: 118194985
Publisher: IEEE
Year: 2001
Weight: 504 KB
Edition: Revised
Volume: 0
Category: Article
ISBN-13: 9780780359987
DOI: 10.1109/memsys.2001.906495

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