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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - Flexible parylene actuator for micro adaptive flow control

✍ Scribed by Pornsin-Sirirak, T.N.; Tai, Y.C.; Nassef, H.; Ho, C.M.

Book ID: 118189289
Publisher: IEEE
Year: 2001
Weight: 416 KB
Edition: Revised
Volume: 0
Category: Article
ISBN-13: 9780780359987
DOI: 10.1109/memsys.2001.906591

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