✦ LIBER ✦

[IEEE Symposium on VLSI Technology - Kyoto, Japan (1997.06.12-1997.06.12)] Symposium on VLSI Technology - Ultra-thin Silicon Nitride Gate Dielectric For Deep-sub-micron CMOS Devices

✍ Scribed by Khare, ; Xin Guo, ; Wang, ; Ma, ; Cui, ; Tamagawa, ; Halpern, ; Schmitt,

No coin nor oath required. For personal study only.

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