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[IEEE SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Cambridge, MA, USA (8-10 Sept. 1997)] SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - The role of boron segregation and transient enhanced diffusion on reverse short channel effect

โœ Scribed by Machala, C.; Wise, R.; Mercer, D.; Chatterjee, A.


Book ID
118273431
Publisher
IEEE
Year
1997
Tongue
English
Weight
292 KB
Volume
0
Category
Article
ISBN-13
9780780337756

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