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[IEEE Semiconducting and Semi-Insulating Materials Conference - Toulouse, France (29 April-3 May 1996)] Proceedings of Semiconducting and Semi-Insulating Materials Conference - Raman scattering analysis of SiGe annealed and implanted layers

✍ Scribed by Valakh, M.Ya.; Romaniuk, B.N.; Artamonov, V.V.; Klyui, N.I.; Perez-Rodriguez, A.; Calvo-Barrio, L.; Serre, C.; Morante, J.R.; Dietrich, B.

Book ID: 126734484
Publisher: IEEE
Year: 1996
Weight: 261 KB
Category: Article
ISBN-13: 9780780331792
DOI: 10.1109/SIM.1996.571086

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