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[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - Post deposition annealing effects on the reliability of ALD HfO/sub 2/ films on strained-Si/sub 0.8/Ge/sub 0.2/ layers

✍ Scribed by Tzeng, P.J.; Maikap, S.; Lai, W.Z.; Liang, C.S.; Chen, P.S.; Lee, L.S.; Liu, C.W.

Book ID: 126597600
Publisher: IEEE
Year: 2004
Weight: 265 KB
Category: Article
ISBN-13: 9780780384545
DOI: 10.1109/IPFA.2004.1345527

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