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[IEEE Oper. Center 2003 International Semiconductor Conference. CAS 2003 - Sinaia, Romania (28 Sept.-2 Oct. 2003)] 2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676) - Optimization of deep wet etching borosilicate glass substrates technological process for biomedical applications

✍ Scribed by Manea, E.; Cernica, I.; Lupu, M.; Podaru, C.

Book ID: 115510226
Publisher: IEEE Oper. Center
Year: 2003
Weight: 270 KB
Volume: 0
Category: Article
ISBN-13: 9780780378216
DOI: 10.1109/smicnd.2003.1251377

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