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[IEEE ISPSD '05. The 17th International Symposium on Power Semiconductor Devices and ICs, 2005. - Santa Barbara, CA, USA (May 23-26, 2005)] Proceedings. ISPSD '05. The 17th International Symposium on Power Semiconductor Devices and ICs, 2005. - Optimized Deep Trench Isolation for High Voltage Smart Power Process

✍ Scribed by R. Lerner, U. Eckoldt

Book ID: 120038155
Publisher: IEEE
Year: 2005
Weight: 607 KB
Category: Article
ISBN-13: 9780780388901
DOI: 10.1109/ISPSD.2005.1487969

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