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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Fabrication and experiment of planar micro ion drag pump

✍ Scribed by Si-Hong Ahn, ; Yong-Kweon Kim,

Book ID: 121826571
Publisher: IEEE
Year: 1997
Weight: 388 KB
Volume: 1
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.613662

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