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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Model for gas film damping in a silicon accelerometer

✍ Scribed by Veijola, T.; Kuisma, H.; Lahdenpera, J.

Book ID: 121661605
Publisher: IEEE
Year: 1997
Weight: 388 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.635391

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