[IEEE International Reliability Physics Symposium - Dallas, TX, USA (30 March-4 April 2003)] 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. - Reliability and electric properties for PECVD a-SiN/sub x/:H films with an optical band-gap ranging from 2.5 to 5.38 eV

✍ Scribed by van Delden, M.H.W.M.; van der Wel, P.J.

• Book ID: 120082515
• Publisher: IEEE
• Year: 2003
• Weight: 322 KB
• Category: Article
• ISBN-13: 9780780376496
• DOI: 10.1109/RELPHY.2003.1197760