𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A highly sensitive and small flow-type chemical analysis system with integrated absorptiometric micro-flowcell

✍ Scribed by Miyake, R.; Tsuzuki, K.; Takagi, T.; Imai, K.

Book ID: 121647887
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 1007 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581779

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Touch mode capacitive pressure sensors for industrial applications

✍ Ko, W.H.; Qiang Wang, 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 505 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A decade of MEMS and its future

✍ Fujita, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 708 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A proportional microvalve using a bi-stable magnetic actuator

✍ Shinozawa, Y.; Abe, T.; Kondo, T. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 489 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - CMOS drivable electrostatic microactuator with large deflection

✍ Yasuda, T.; Shimoyama, I.; Miura, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 653 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A three-dimensional shape memory alloy loop actuator

✍ Nakamura, Y.; Nakamura, S.; Buchaillot, L.; Fujita, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 441 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A packaged silicon MEMS vibratory gyroscope for microspacecraft

✍ Tang, T.K.; Gutierrez, R.C.; Stell, C.B.; Vorperian, V.; Arakaki, G.A.; Rice, J. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 846 KB