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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - DRIE-fabricated curved-electrode zipping actuators with low pull-in voltage

✍ Scribed by Jian Li, ; Brenner, M.P.; Lang, J.H.; Slocum, A.H.; Struempler, R.

Book ID: 121239115
Publisher: IEEE
Year: 2003
Weight: 371 KB
Volume: 1
Category: Article
ISBN-13: 9780780377318
DOI: 10.1109/SENSOR.2003.1215358

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